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SIMS & NanoSIMS

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  • Dynamic SIMS for semicon
    Dynamic SIMS for Semiconductors

    jueves, septiembre 16, 2021

    A review of a broad array of IC applications with Dynamic SIMS, from deep to ultra-shallow implant depth profiling in Si-based semiconductors to compositional analysis of thin multilayers in patterned wafer pads, optoelectronics, 2D and non-planar 3D structures. Speaker: Pawel Michałowski, expert-user of CAMECA SC Ultra SIMS at Łukasiewicz Research Network – Institute of Microelectronics and Photonics, Poland

    Duration : 20 minutes

  • Large SIMS: Triple Oxygen Isotope Measurements by Multi-Collector
    Large SIMS: Triple Oxygen Isotope Measurements by Multi-Collector

    viernes, julio 16, 2021

    Large-geometry SIMS equipped with a multicollector system (LG-SIMS) provide the best performance for geo- and cosmochemistry applications as they provide in situ analysis with both high spatial resolution and high precision. Recently, latest generations LG-SIMS were equipped with low noise 1012Ω resistor Faraday Cup preamplifier boards optimized for the measurement of low intensity signals. This talk describes an innovative path for triple oxygen isotope analyses, based on the measurement of the 17O minor isotope on a Faraday Cup detector equipped with a 1012Ω preamplifier board. This new analytical method allows nowadays to routinely measure oxygen isotopic ratios (18O/16O and 17O/16O) in various matrices with a precision (internal error and reproducibility) better than 0.5‰ (2σ), a spatial resolution smaller than 10 μm and in a few minutes per analysis.
    This work is the result of a collaboration between CAMECA and the CRPG Nancy lab in France.

    Duration : 15 minutes

  • CAMECA IMS 7f-GEO: a compact SIMS tool for stable isotope analyses
    IMS 7f-GEO: a compact SIMS tool for stable isotope analyses

    martes, mayo 11, 2021

    This free on-demand webinar focuses on the IMS 7f-Geo, a small-geometry versatile SIMS model designed to meet the high precision/high throughput requirements of stable isotope and trace element analysis for the geosciences community. After an introduction to the SIMS technique and a presentation of IMS 7f-GEO key instrumental features, different examples of studies based on stable isotope measurements will be presented. It also includes a short overview of the CAMECA SIMS instrument portfolio addressing geosciences applications.

    Duration : 22 minutes