Skip to content
Español
Search

IMS 7f-Auto

Herramienta SIMS versátil: Sensibilidad de detección de referencia con alto rendimiento y automatización completa
El IMS 7f-Auto es la versión más reciente de nuestra exitosa línea de productos de Espectrómetro de masa de iones secundarios (SIMS) IMS xf. Diseñado para entregar análisis elementales e isotópicos de alta precisión con mayor facilidad de uso y productividad, ha sido optimizado para aplicaciones desafiantes como cristal, metales, cerámica, dispositivos basados en Si, III-V y II-VI, materiales a granel, películas delgadas ... que cumplen los requisitos de la industria para el desarrollo eficiente de dispositivos y el control de procesos.

  • Descripción general de producto +


    Características analíticas clave para resolver una amplia gama de problemas analíticos
    El IMS 7f-Auto ofrece capacidades de perfilado de profundidad incomparables con alta resolución de profundidad y alto rango dinámico. El espectrómetro de masa de alta transmisión se combina con dos fuentes reactivas de iones de alta densidad, O2+ y Cs+, proporcionando así una alta tasa de pulverización y excelentes límites de detección. Un diseño óptico único permite tanto la microscopía de iones directa como la exploración de imágenes de microsonda.

    Mejora de la automatización y la eficiencia operativa
    El IMS 7f-Auto está equipado con una columna principal en línea rediseñada para facilitar y agilizar el ajuste del haz primario y la estabilidad optimizada de la corriente del haz primario. Las nuevas rutinas automatizadas minimizan los sesgos relacionados con el operador y mejoran la facilidad de uso. Una cámara de almacenamiento motorizada con carga/descarga automática de portamuestras garantiza un alto rendimiento mediante el encadenamiento de análisis y la operación remota.

    Alta reproducibilidad a alto rendimiento
    Gracias a su nueva cámara de almacenamiento motorizada y transferencia de muestras, el IMS 7f-Auto puede analizar múltiples muestras en modo encadenado o remoto. Las mediciones pueden ser totalmente desatendidas y automatizadas, con un rendimiento y reproducibilidad inigualables. Se puede lograr la máxima reproducibilidad (RSD < 0,5 %), junto con excelentes límites de detección, alto rendimiento y productividad (la herramienta se puede utilizar las 24 horas con una intervención mínima del operador).

  • Ver seminarios web +

    • Dynamic SIMS for Ion Implants: Fundamental Concepts and Applications

      jueves, noviembre 13, 2025

      A technical webinar on ion implant use for SIMS quantification and common pitfalls, co-hosted by Loughborough Surface Analysis Ltd and CAMECA.
      ↓ ON DEMAND HERE
      Click here to view
    • SIMS analysis of an oxide thin film with continuous composition gradient

      martes, diciembre 3, 2024

      Explore the application of Dynamic SIMS on thin film analysis with our speaker Joseph Scola, from the University of Paris-Saclay/UVSQ.
      ↓ Duration: 36 minutes
      Click here to view
    • Enhanced Characterization of Very Deep Proton Implants with Dynamic SIMS

      viernes, mayo 31, 2024

      Explore the superior capabilities of Dynamic SIMS for analyzing low-dose deep proton implants in industrially relevant silicon with Orazio Samperi, University of Catania/STMicroelectronics Key take aways include: The importance of proton implantation, the pivotal role of Dynamic Secondary Ion Mass Spectrometry for analyzing low-dose deep proton implants in silicon, ensuring quality and performance of semiconductor devices and a new protocol enabling reliable depth profiling of H implants with concentrations in the order of 1E16cm-3, exceeding depths of 20 μm! .
      ↓ Duration: 60 minutes
      Click here to view
    • Advancing High-Efficiency Silicon Solar Cells through Inkjet Printing of Polysilicon Passivating Contacts: Insights from SIMS Analysis - Webinar

      jueves, enero 4, 2024

      Australian National University scientists Dr. Sieu Pheng Phang and Ms Jiali Wang report on the use of Dynamic SIMS to characterize inkjet-printed passivating contacts for improved silicon solar cells.
      ↓ Duration: 38 minutes
      Click here to view
    • Optimization of carbon detection limit in Silicon using the raster change method

      miércoles, mayo 10, 2023

      Seoyoun (Joan) Choi, CAMECA expert application engineer for SIMS, presents applications of the “raster change” dynamic SIMS method for measuring the carbon concentration in silicon samples.
      ↓ Duration: 14 minutes
      Click here to view
    • Lithium Diffusion In Li-Ion Battery Materials Revealed By SIMS

      martes, noviembre 15, 2022

      Learn from Dr Naoaki Kuwata, NIMS, Japan, how Secondary Ion Mass Spectrometry can be used to accurately measure lithium diffusion coefficients in Li-based thin films, supporting Li-ion battery material optimization..
      ↓ Duration: 18 minutes
      Click here to view

  • Vea lo que puede hacer el IMS 7f-Auto +

  • Descargar documentación +

  • Video +

    • IMS 7f-Auto Automation
      IMS 7f-Auto video

      See the IMS 7f-Auto in action in our last video: high analytical performance with full automation & ease of use - The leader Secondary Ion Mass Spectrometry sensitivity and throughput. You too can get your data overnight!

  • Publicaciones científicas +


    Una hoja de cálculo de Excel que recopila artículos de investigación científicos utilizando el IMS xf (IMS 3f, 4f, 5f, 6f, 7f, IMS 7f-Auto, IMS 7f-GEO). Los artículos están ordenados por las principales aplicaciones de la siguiente manera y se pueden buscar fácilmente con las funciones de búsqueda de palabras de Excel
    • Materials
    • Geosciences
    • Nuclears
    Descargue la hoja de cálculo aquí.

    No dude en ponerse en contacto con nosotros en cameca.info@ametek.com si no puede tener acceso a los archivos PDF por su cuenta. ¡También puede enviarnos cualquier referencia, pdf y suplemento que falte!

  • Enlaces a usuarios de IMS alrededor del mundo +

    Several hundred CAMECA IMS 6f, 7f, 7f-Auto and 7f-GEO are installed worldwide, the list below is only a very short extract from our customer list!

    Materials Research Laboratory (MRL) at University of California Santa Barbara, USA
    Widely recognized as one of the top five materials research facilities in the world, the MRL serves as the innovation engine for discoveries in new materials.

    Nanoscale Characterization and Fabrication Laboratory, Virginia Tech, USA
    Operated by the University's Institute for Critical Technology and Applied Science (ICTAS), the Nanoscale Characterization and Fabrication Laboratory serves the needs of researchers from VirginiaTech and from the surrounding industrial community, facilitating research in nanoscale engineering and the environment, fuel cells, paleobiology... The NCFL was one the first lab in the world to be equipped with a CAMECA IMS 7f-GEO.

    Washington University in Saint-Louis (WUSTL), USA
    WUSTL’s Stable Isotope Biogeochemistry Group has been equipped with an IMS 7f-GEO since 2013. Research focuses on micro-scale variations in the C and S isotopic composition of biological and sedimentary materials, biogeochemical interactions between microbes and their environment.

    CalTech Center for Microanalysis, USA
    The Center for Microanalysis at Caltech houses a IMS 7f-GEO and a NanoSIMS 50L, providing expertise for microanalysis of geological, meteoritic and synthetic materials. Research projects carried out at CCM are most varied, ranging from cosmochemistry to experimental studies on climate change, geochronology, in-situ studies of microbial communities, materials science engineering...

    University of Manitoba, Manitoba Regional Materials and Surface Characterization Facility, Canada
    Equipped with a CAMECA IMS 7f and several other instruments for materials characterization, the Manitoba Regional Materials and Surface Characterization Facility provides a unique resource to regional government and industrial researchers and enables world-class research into the chemical, structural and morphological nature of surfaces and bulk materials.

    Helmholtz Zentrum Dresden Rossendorf, Germany
    The CAMECA IMS series instrument in Rossendorf is coupled to an accelerator mass spectrometer at the core of the "Super-SIMS" initiative of the Helmholtz Institute Freiberg for Resource Technology.

    Ioffe Institute, St Petersburg, Russia
    The Ioffe Institute is one of Russia's largest institutions for research in physics and materials. Under leadership from Boris Ber, the Surface Analysis Group applies various IMS microprobes to investigations of coatings, thin films and various semiconductor structures.

    University of Edinburgh, Scotland, UK
    The School of Geoscience at University of Edinburgh is one of the largest and most successful groupings of geographers, Earth and environmental scientists in the UK. It is equipped with various CAMECA ion microprobes including an IMS 7f-GEO.

    GEMAC Univ. Versailles, France
    The GEMAC laboratory is equipped with an IMS 7f model used to investigate and develop materials, nanostructures and prototypes of elementary devices for electronics and optoelectronics.

    CIM PACA, Arcsis, France
    Located in the South East of France, a basin for semiconductor production, CIM PACA is the flagship characterization platform of ARCSIS, a consortium that unites world-ranking semiconductor groups including Philips, STMicroelectronics, Texas Instruments etc... as well as several dozens of small and mid-size companies, engineering schools, research laboratories and universities of the region. CIM-PACA is dedicated to the design, test and validation of new semiconductor technologies.

    CC-MEM, Institut Jean Lamour / Ecole des Mines de Nancy, France
    The Centre de Compétences en Microscopie Electronique et Microsondes (CC-MEM) is a collaborative research facility hosted by the Ecole des Mines de Nancy. The IMS 7f delivered in 2009 at CC-MEM contributes to cutting-edge research in material sciences, metallurgy, nanosciences.

    Cinvestav, Seccion de electronica del estado solido, Mexico
    Created in 1961, Cinvestav (Advanced Studies Center of the National Polytechnic Institute of Mexico) is a leader institution in research and postgraduate education in Mexico and the world

  • Software +

    • SmartPRO

      El nuevo paquete de software SmartPRO para espectrómetros de masas de iones ultra secundarios CAMECA IMS 7f-Auto, IMS Wf y SC combina análisis de cadena y WinCurve en un entorno perfectamente integrado y agrega funcionalidades de automatización y procesamiento de datos en tiempo real, mejorando así la facilidad de uso, la productividad y la calidad de los datos.

      Seguir leyendo

    • WinCurve dataprocessing sofware
      WinCurve

      Desarrollado específicamente para instrumentos SIMS de CAMECA, WinCurve ofrece potentes capacidades de procesamiento y visualización de datos en un entorno fácil de usar.

      Seguir leyendo

    • WinImage Software
      WinImage II

      Desarrollado específicamente para los instrumentos SIMS de CAMECA, WinImage II ofrece potentes capacidades de visualización, procesamiento e impresión de imágenes en un entorno de Windows? para PC Entorno.

      Seguir leyendo

    • APM Software
      APM

      La medición automática de partículas (APM) es una herramienta de software de CAMECA que permite el filtrado rápido de millones de partículas, la detección de partículas y la caracterización isotópica.

      Seguir leyendo

  • Kits de actualización +

    Specific to IMS 6f users: extend the lifetime of your instrument with our IMS 6f overhaul program:
    IMS 6f ion microprobes are robust, but old instruments whose electronic components are becoming obsolete. To minimize the risk of long, non-scheduled downtime, CAMECA  offers an IMS 6f overhaul program, that will fully rejuvenate your instrument with a complete new electronics system, pumping and vacuum, new hardware, full automation, user-friendly acquisition and processing software, etc...
    Download the IMS 6f-E7 upgrade flyer for all details of this upgrade and its benefits in terms of performance, productivity, ease-of-use, and of course, uptime and sustainability.


    To view upgrade options available for IMS 6f-E7 and 7f, click on either of the components below:
    Automation & Software
    Sources
    Airlock
    Specimen Chamber
    Optical System
    Vacuum
    Automation & Software

    PC-Automation (7f equipped with SUN workstation)
    PC automation system to replace SUN system, allows full automation & unattended operation and greatly improves performance and throughput.

    Post-treatment Station (6f-E7/ 7f)
    PC computer for off-line data processing (CAMECA software not included).

    Desk Control Duplication (7f with PC-Automation / 6f-E7)
    Instrument control from an operator room. Ensures optimized operation comfort when the lab is split in two parts.

    APM Software Licence (PC-Automation / 6f-E7 /7f with PC-Automation)
    Automated Particle Measurement software program for fast screening of large numbers of particles and detection of specific elements or isotopes. More information.

    WinCurve Software Licence (offline) (7f / 6f-E7)
    Offers powerful SIMS data processing & graphing capabilities. More information.

    WinImage II Software Licence (offline) (7f / 6f-E7)
    Offers powerful SIMS image processing capabilities. More information.

    Top of page

    Sources

    Cs Ion Source Isolation (7f with PC-Automation)
    Isolation and Pumping of the Cesium Microbeam Source.

    Duo Accel/Decel (7f with PC-Automation)
    Low primary ion energy system for the duoplasmatron source.

    Top of page

    Airlock

    Storage Chamber Upgrade (7f with PC-Automation / 6f-E7)
    Manual storage chamber with its load-lock designed to store up to six sample holders under high vacuum. Ensures substantial throughput improvements for applications that depend on the best UHV conditions. 

    Top of page

    Specimen chamber

    Z-Motion (7f with PC-Automation / 6f-E7)
    Z-Axis manual adjustment for the sample stage.

    Turbospectro upgrade (7f with PC-Automation / 6f-E7)
    Turbomolecular pumps for the mass spectrometer (to replace the existing ion pumps, for optimized pumping speed in the mass spectrometer and improved abundance sensitivity while using the oxygen flooding.

    Digital Video Camera (7f with PC-Automation / 6f-E7)
    Numerical camera and LED sample illustration system (white light).

    EPS (7f with PC-Automation)
    Electrical isolation of the magnet flight tube in order to allow fast mass peak switching.

    Top of page

    Secondary Optical System

    EM Detector Post-accelaration (7f with PC-Automation)
    Postacceleration for the electron multiplier detector. Increases sensitivity when analysing heavy elements and when running the mass spectrometer at low secondary extraction voltage (<3 kV).

    Vacuum

    Pfeiffer Turbopump 7f
    Peiiffer Turbopump 6fe7