IMS 7f-Auto

Herramienta SIMS versátil: Sensibilidad de detección de referencia con alto rendimiento y automatización completa
El IMS 7f-Auto es la versión más reciente de nuestra exitosa línea de productos de Espectrómetro de masa de iones secundarios (SIMS) IMS xf. Diseñado para entregar análisis elementales e isotópicos de alta precisión con mayor facilidad de uso y productividad, ha sido optimizado para aplicaciones desafiantes como cristal, metales, cerámica, dispositivos basados en Si, III-V y II-VI, materiales a granel, películas delgadas ... que cumplen los requisitos de la industria para el desarrollo eficiente de dispositivos y el control de procesos.
  • Descripción general de producto +


    Características analíticas clave para resolver una amplia gama de problemas analíticos
    El IMS 7f-Auto ofrece capacidades de perfilado de profundidad incomparables con alta resolución de profundidad y alto rango dinámico. El espectrómetro de masa de alta transmisión se combina con dos fuentes reactivas de iones de alta densidad, O2+ y Cs+, proporcionando así una alta tasa de pulverización y excelentes límites de detección. Un diseño óptico único permite tanto la microscopía de iones directa como la exploración de imágenes de microsonda.

    Mejora de la automatización y la eficiencia operativa
    El IMS 7f-Auto está equipado con una columna principal en línea rediseñada para facilitar y agilizar el ajuste del haz primario y la estabilidad optimizada de la corriente del haz primario. Las nuevas rutinas automatizadas minimizan los sesgos relacionados con el operador y mejoran la facilidad de uso. Una cámara de almacenamiento motorizada con carga/descarga automática de portamuestras garantiza un alto rendimiento mediante el encadenamiento de análisis y la operación remota.

    Alta reproducibilidad a alto rendimiento
    Gracias a su nueva cámara de almacenamiento motorizada y transferencia de muestras, el IMS 7f-Auto puede analizar múltiples muestras en modo encadenado o remoto. Las mediciones pueden ser totalmente desatendidas y automatizadas, con un rendimiento y reproducibilidad inigualables. Se puede lograr la máxima reproducibilidad (RSD < 0,5 %), junto con excelentes límites de detección, alto rendimiento y productividad (la herramienta se puede utilizar las 24 horas con una intervención mínima del operador).
  • Vea lo que puede hacer el IMS 7f-Auto +

  • descargar documentación +

  • Publicaciones científicas +


    Una hoja de cálculo de Excel que recopila artículos de investigación científicos utilizando el IMS xf (IMS 3f, 4f, 5f, 6f, 7f, IMS 7f-Auto, IMS 7f-GEO). Los artículos están ordenados por las principales aplicaciones de la siguiente manera y se pueden buscar fácilmente con las funciones de búsqueda de palabras de Excel
    • Materials
    • Geosciences
    • Nuclears
    Descargue la hoja de cálculo aquí.

    No dude en ponerse en contacto con nosotros en cameca.info@ametek.com si no puede tener acceso a los archivos PDF por su cuenta. ¡También puede enviarnos cualquier referencia, pdf y suplemento que falte!
  • View webinars +


    We will be releasing several webinars on Secondary Ion Mass Spectrometry, all available on demand. You will just need connect to the third-party platform and sign up, you can then view the chosen webinar at any time. 

    Dynamic SIMS for characterization of nuclear materials

    Webinar SIMS Nuclear Materials
    In order to ensure longevity of structural nuclear materials and to improve knowledge on the mechanisms that occur during reactor accidents, it is of great importance to better understand diffusion and migration mechanisms of fission products in nuclear materials and fuel. To that purpose, SIMS analyses are performed on different materials after ion implantation with natural isotopes of high fission yield species (such as molybdenum, helium, xenon, iodine). Application of dynamic SIMS to the characterization of nuclear particles collected in nuclear facilities for safeguards purposes is also discussed. The data presented in this webinar are the result of collaborations between CAMECA and several users of our instruments from different labs worldwide working in the nuclear science field.
    Presenter: Dr Paula Peres, CAMECA SIMS Product Manager
    Duration: 32 minutes
    Follow the link to access the webinar Dynamic SIMS for characterization of nuclear materials

    Optimization of the Detection Limits for Light Elements (H, C, O)

    This webinar focuses on the optimization of the detection limits for light elements (hydrogen, carbon, and oxygen atmospheric species) in silicon-based materials using dynamic SIMS. Information on H, C an d O low-level impurities introduced during processing and/or ageing is of major importance for a better understanding of semiconductor device lifetime and failure modes. Dynamic SIMS plays an important role in evaluating the concentration of impurities in solid samples because of its high sensitivity and depth profiling capabilities with high depth resolution and throughput, and the IMS 7f-Auto is designed to achieve optimized detection limits for light elements. Data presented in this webinar shows that significant improvement of H, C, and O detection limits in Si is achieved using the pre-sputtering method. Results obtained using multiple sample holders and the automated storage chamber are also presented.

    Presenter: Dr Paula Peres, CAMECA SIMS Product Manager
    Duration: 25 minutes
    Follow the link to access the webinar Optimization of the Detection Limits for Light Elements (H, C, O)

    More to come!


  • Enlaces a usuarios de IMS alrededor del mundo +

    Several hundred CAMECA IMS 6f, 7f, 7f-Auto and 7f-GEO are installed worldwide, the list below is only a very short extract from our customer list!

    Nanoscale Characterization and Fabrication Laboratory, Virginia Tech, USA

    Operated by the University's Institute for Critical Technology and Applied Science (ICTAS), the Nanoscale Characterization and Fabrication Laboratory serves the needs of researchers from VirginiaTech and from the surrounding industrial community, facilitating research in nanoscale engineering and the environment, fuel cells, paleobiology... The NCFL was one the first lab in the world to be equipped with a CAMECA IMS 7f-GEO.

    CalTech Center for Microanalysis, USA

    The Center for Microanalysis at Caltech houses a IMS 7f-GEO and a NanoSIMS 50L, providing expertise for microanalysis of geological, meteoritic and synthetic materials. Research projects carried out at CCM are most varied, ranging from cosmochemistry to experimental studies on climate change, geochronology, in-situ studies of microbial communities, materials science engineering...

    Helmholtz Zentrum Dresden Rossendorf, Germany
    The CAMECA IMS series instrument in Rossendorf is coupled to an accelerator mass spectrometer at the core of the "Super-SIMS" initiative of the Helmholtz Institute Freiberg for Resource Technology.

    University of Manitoba, Manitoba Regional Materials and Surface Characterization Facility, Canada
    Equipped with a CAMECA IMS 7f and several other instruments for materials characterization, the Manitoba Regional Materials and Surface Characterization Facility provides a unique resource to regional government and industrial researchers and enables world-class research into the chemical, structural and morphological nature of surfaces and bulk materials.

    CIM PACA, Arcsis, France

    Located in the South East of France, a basin for semiconductor production, CIM PACA is the flagship characterization platform of ARCSIS, a consortium that unites world-ranking semiconductor groups including Philips, STMicroelectronics, Texas Instruments etc... as well as several dozens of small and mid-size companies, engineering schools, research laboratories and universities of the region. CIM-PACA is dedicated to the design, test and validation of new semiconductor technologies.

    CC-MEM, Institut Jean Lamour / Ecole des Mines de Nancy, France

    The Centre de Compétences en Microscopie Electronique et Microsondes (CC-MEM) is a collaborative research facility hosted by the Ecole des Mines de Nancy. The IMS 7f delivered in 2009 at CC-MEM contributes to cutting-edge research in material sciences, metallurgy, nanosciences.

    Cinvestav, Seccion de electronica del estado solido, Mexico
    Created in 1961, Cinvestav (Advanced Studies Center of the National Polytechnic Institute of Mexico) is a leader institution in research and postgraduate education in Mexico and the world

  • Software +

    • WinCurve dataprocessing sofware
      WinCurve

      Desarrollado específicamente para instrumentos SIMS de CAMECA, WinCurve ofrece potentes capacidades de procesamiento y visualización de datos en un entorno fácil de usar.

      Seguir leyendo

    • WinImage Software
      WinImage II

      Desarrollado específicamente para los instrumentos SIMS de CAMECA, WinImage II ofrece potentes capacidades de visualización, procesamiento e impresión de imágenes en un entorno de Windows? para PC Entorno.

      Seguir leyendo

    • APM Software
      APM

      La medición automática de partículas (APM) es una herramienta de software de CAMECA que permite el filtrado rápido de millones de partículas, la detección de partículas y la caracterización isotópica.

      Seguir leyendo

  • Kits de actualización +

    Specific to IMS 6f users: extend the lifetime of your instrument with our IMS 6f overhaul program:
    IMS 6f ion microprobes are robust, but old instruments whose electronic components are becoming obsolete. To minimize the risk of long, non-scheduled downtime, CAMECA  offers an IMS 6f overhaul program, that will fully rejuvenate your instrument with a complete new electronics system, pumping and vacuum, new hardware, full automation, user-friendly acquisition and processing software, etc...
    Download the IMS 6f-E7 upgrade flyer for all details of this upgrade and its benefits in terms of performance, productivity, ease-of-use, and of course, uptime and sustainability.


    To view other available options, click on either of the components below:
    Automation & Software
    Sources
    Airlock
    Specimen Chamber
    Optical System

    Automation & Software

    PC-Automation (6f / 7f equipped with SUN workstation)
    PC automation system to replace SUN system, allows full automation & unattended operation and greatly improves performance and throughput. For more information, download the IMS 6f PC-Automation Upgrade flyer.

    Post-treatment Station (6f / 6f-E7/ 7f)
    PC computer for off-line data processing (CAMECA software not included).

    Desk Control Duplication (7f with PC-Automation / 6f-E7)
    Instrument control from an operator room. Ensures optimized operation comfort when the lab is split in two parts.

    APM Software Licence (6f with PC-Automation / 6f-E7 /7f with PC-Automation)
    Automated Particle Measurement software program for fast screening of large numbers of particles and detection of specific elements or isotopes. More information.

    WinCurve Software Licence (offline) (6f / 7f / 6f-E7)
    Offers powerful SIMS data processing & graphing capabilities. More information.

    WinImage II Software Licence (offline) (6f / 7f / 6f-E7)
    Offers powerful SIMS image processing capabilities. More information.

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    Sources

    Cs Ion Source Isolation (7f with PC-Automation)
    Isolation and Pumping of the Cesium Microbeam Source.

    Duo Accel/Decel (7f with PC-Automation)
    Low primary ion energy system for the duoplasmatron source.

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    Airlock

    Storage Chamber Upgrade (7f with PC-Automation / 6f-E7)
    Manual storage chamber with its load-lock designed to store up to six sample holders under high vacuum. Ensures substantial throughput improvements for applications that depend on the best UHV conditions. 

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    Specimen chamber

    Z-Motion (7f with PC-Automation / 6f-E7)
    Z-Axis manual adjustment for the sample stage.

    Turbospectro upgrade (7f with PC-Automation / 6f-E7)
    Turbomolecular pumps for the mass spectrometer (to replace the existing ion pumps, for optimized pumping speed in the mass spectrometer and improved abundance sensitivity while using the oxygen flooding.

    Digital Video Camera (7f with PC-Automation / 6f-E7)
    Numerical camera and LED sample illustration system (white light).

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    Secondary Optical System

    EM Detector Post-accelaration (7f with PC-Automation)
    Postacceleration for the electron multiplier detector. Increases sensitivity when analysing heavy elements and when running the mass spectrometer at low secondary extraction voltage (<3 kV).